(19)
(11) EP 1 253 320 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
04.02.2004 Bulletin 2004/06

(43) Date of publication A2:
30.10.2002 Bulletin 2002/44

(21) Application number: 02008979.3

(22) Date of filing: 23.04.2002
(51) International Patent Classification (IPC)7F04B 43/04, F04B 53/10
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 24.04.2001 JP 2001125904

(71) Applicant: Matsushita Electric Works, Ltd.
Kadoma-shi, Osaka (JP)

(72) Inventors:
  • Urano, Yoji
    Kadoma-shi, Osaka 571-8686 (JP)
  • Kawaguchi, Tatsuji
    Kadoma-shi, Osaka 571-8686 (JP)
  • Kitahara, Harunori
    Kadoma-shi, Osaka 571-8686 (JP)

(74) Representative: Dallmeyer, Georg, Dipl.-Ing. et al
Patentanwälte von Kreisler-Selting-Werner Postfach 10 22 41
50462 Köln
50462 Köln (DE)

   


(54) Pump and method of manufacturing same


(57) A compact pump has a pump chamber, inlet and outlet channels communicating with the pump chamber, and a pair of check valve units between the pump chamber and the inlet and outlet channels. Each check valve unit has a thin film check valve membrane, and a check valve body with a channel opened and closed by the check valve membrane due to a pressure difference.







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