(19)
(11) EP 1 254 477 A2

(12)

(88) Date of publication A3:
21.02.2002

(43) Date of publication:
06.11.2002 Bulletin 2002/45

(21) Application number: 01910554.3

(22) Date of filing: 08.02.2001
(51) International Patent Classification (IPC)7: H01L 21/00
(86) International application number:
PCT/US0104/444
(87) International publication number:
WO 0105/9815 (16.08.2001 Gazette 2001/33)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 09.02.2000 US 501002
08.12.2000 US 733608

(71) Applicant: SEMITOOL, INC.
Kalispell,Montana 59901 (US)

(72) Inventors:
  • Weaver, Robert A.
    Whitefish, MT 59937 (US)
  • Wilson, Gregory J.
    Kalispell, MT 59901 (US)
  • Mchugh, Paul R.
    Kalispell, MT 59901 (US)
  • Zila, Vladimir
    Toronto, Ontario M1B 4Z8 (CA)

(74) Representative: Grünecker, Kinkeldey, Stockmair & SchwanhäusserAnwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)

   


(54) METHOD AND APPARATUS FOR PROCESSING A MICROELECTRONIC WORKPIECE AT AN ELEVATED TEMPERATURE