(19)
(11) EP 1 256 126 A1

(12)

(43) Date of publication:
13.11.2002 Bulletin 2002/46

(21) Application number: 01905084.8

(22) Date of filing: 26.01.2001
(51) International Patent Classification (IPC)7H01L 21/311, C09K 13/08
(86) International application number:
PCT/US0102/569
(87) International publication number:
WO 0105/7921 (09.08.2001 Gazette 2001/32)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 04.02.2000 US 497864

(71) Applicant: MOTOROLA, INC.
Schaumburg, IL 60196 (US)

(72) Inventors:
  • MATAMIS, George
    Scottsdale, AZ 85251 (US)
  • DENTON, Heidi, L.
    Scottsdale, AZ 85259 (US)
  • DAVISON, Michael, J.
    Mesa, AZ 85208 (US)
  • SMITH, Jeffrey, A.
    Gilbert, AZ 85296 (US)

(74) Representative: McCormack, Derek James 
MotorolaEuropean Intellectual Property OperationsMidpointAlencon Link
BasingstokeHampshire RG21 7PL
BasingstokeHampshire RG21 7PL (GB)

   


(54) ETCHING SOLUTION AND METHOD