A PROCESS FOR FORMING A SEMICONDUCTOR STRUCTURE - Patent 1258030

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EP 1 258 030 A1

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(43)	Date of publication:
	20.11.2002 Bulletin 2002/47

(21)	Application number: 01907188.5

(22)	Date of filing: 08.02.2001

(51)	International Patent Classification (IPC)⁷: H01L 21/20, H01L 21/36, H01L 21/8258

(86)	International application number:
	PCT/US0104/388

(87)	International publication number:
	WO 0105/9821 (16.08.2001 Gazette 2001/33)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

10.02.2000 US 502023

(71)	Applicant: MOTOROLA, INC.
	Schaumburg, IL 60196 (US)

(72)	Inventors:
	RAMDANI, Jamal Gilbert, AZ 85233 (US) DROOPAD, Ravindranath Chandler, AZ 85226 (US) HILT, Lyndee, L. Chandler, AZ 85226 (US) EISENBEISER, Kurt, William Tempe, AZ 85284 (US)

(74)	Representative: McCormack, Derek James
	MotorolaEuropean Intellectual Property OperationsMidpointAlencon Link BasingstokeHampshire RG21 7PL BasingstokeHampshire RG21 7PL (GB)

(54)	A PROCESS FOR FORMING A SEMICONDUCTOR STRUCTURE