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(11) | EP 1 258 670 A3 |
(12) | EUROPEAN PATENT APPLICATION |
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(54) | Gas containment system |
(57) A gas containment system comprising a source of high pressure gas and means to regulate
the supply of the gas to processing apparatus, wherein in the event of failure of
the regulatory means, means are provided to direct gas escaping from the regulatory
means in to a chamber at sub-atmospheric pressure. |