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(11)

EP 1 261 986 A1

(12)

(43) Date of publication: 04.12.2002 Bulletin 2002/49 (21) Application number: 01907971.4 (22) Date of filing: 02.03.2001

(51) International Patent Classification (IPC)7: H01L 21/18, H01L 21/266, H01S 5/026 (86) International application number: PCT/GB0100/904 (87) International publication number: WO 0106/7497 (13.09.2001 Gazette 2001/37)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 08.03.2000 WO PCT/SG00/00039 08.03.2000 WO PCT/SG00/00038 11.09.2000 SG 200004786 11.09.2000 SG 200004787 (71) Applicant: NTU Ventures Pte. Ltd. Singapore 637722 (SG)	(72) Inventors: Ooi, Boon Siew Tanjung BungaPenang 11200 (MY) Lam, Yee Loy Singapore 680271 (SG) Chan, Yuen Chuen Singapore 138678 (SG) Zhou, Yan Singapore 658881 (SG) Tam, Siu Chung Singapore 599154 (SG) (74) Representative: Finnie, Peter John  Gill Jennings & Every,Broadgate House,7 Eldon Street London EC2M 7LH London EC2M 7LH (GB)