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(11) | EP 1 263 135 A3 |
(12) | EUROPEAN PATENT APPLICATION |
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(54) | Dual Directional Harmonics Dissipation System |
(57) An apparatus is disclosed wherein a dual directional harmonics dissipation filter
includes an input terminal coupled to a RF power amplifier providing a radio frequency
signal in a predetermined frequency range, an output terminal for providing the radio
frequency signal to a load at the predetermined frequency range, a low pass filter
connected between the input terminal and the output terminal, and a plurality of high
pass filters coupled to the low pass filter wherein the plurality of high pass filters
receive and dissipate signals in excess of the predetermined frequency range and wherein
the plurality of high pass filter's effect on the impedance is offset at the input
and output of the low pass filter. Energy dissipation in an RF generator system is
accomplished by supplying an RF signal from a RF power amplifier, diverting signals
from the RF power amplifier having frequencies in excess of a predetermined frequency
range to a first high pass filter, dissipating the signal in excess of the predetermined
frequency range, and receiving harmonic energy from a plasma chamber to a second high
pass filter, and dissipating the harmonic energy. |