(19)
(11) EP 1 263 135 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
04.08.2004 Bulletin 2004/32

(43) Date of publication A2:
04.12.2002 Bulletin 2002/49

(21) Application number: 02252527.3

(22) Date of filing: 09.04.2002
(51) International Patent Classification (IPC)7H03H 7/01
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 11.04.2001 US 832476

(71) Applicant: Eni Technology, Inc.
Rochester, NY 14623-3498 (US)

(72) Inventors:
  • Chawla, Yogendra K.
    Pittsford, New York 14534 (US)
  • Freese, David
    Rochester, New York 14616 (US)

(74) Representative: Calderbank, Thomas Roger et al
Mewburn Ellis LLP York House 23 Kingsway
London WC2B 6HP
London WC2B 6HP (GB)

   


(54) Dual Directional Harmonics Dissipation System


(57) An apparatus is disclosed wherein a dual directional harmonics dissipation filter includes an input terminal coupled to a RF power amplifier providing a radio frequency signal in a predetermined frequency range, an output terminal for providing the radio frequency signal to a load at the predetermined frequency range, a low pass filter connected between the input terminal and the output terminal, and a plurality of high pass filters coupled to the low pass filter wherein the plurality of high pass filters receive and dissipate signals in excess of the predetermined frequency range and wherein the plurality of high pass filter's effect on the impedance is offset at the input and output of the low pass filter. Energy dissipation in an RF generator system is accomplished by supplying an RF signal from a RF power amplifier, diverting signals from the RF power amplifier having frequencies in excess of a predetermined frequency range to a first high pass filter, dissipating the signal in excess of the predetermined frequency range, and receiving harmonic energy from a plasma chamber to a second high pass filter, and dissipating the harmonic energy.







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