FIXED ABRASIVE LINEAR POLISHING BELT AND SYSTEM USING THE SAME - Patent 1268130

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EP 1 268 130 A1

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(43)	Date of publication:
	02.01.2003 Bulletin 2003/01

(21)	Application number: 01922765.1

(22)	Date of filing: 28.03.2001

(51)	International Patent Classification (IPC)⁷: B24B 37/04, B24B 21/04, B24D 11/02

(86)	International application number:
	PCT/US0109/870

(87)	International publication number:
	WO 0107/4535 (11.10.2001 Gazette 2001/41)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

31.03.2000 US 540810

(71)	Applicant: Lam Research
	Fremont, CA 94538 (US)

(72)	Inventors:
	ZHAO, Yuexing San Jose, CA 95131 (US) XU, Cangshan Fremont, CA 94539 (US) BOYD, John, M. Atascadero, CA 93422 (US) OWCZARZ, Aleksander San Jose, CA 95135 (US)

(74)	Representative: Bucks, Teresa Anne et al
	BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)

(54)	FIXED ABRASIVE LINEAR POLISHING BELT AND SYSTEM USING THE SAME