FABRICATION OF SEMICONDUCTOR MATERIALS AND DEVICES WITH CONTROLLED ELECTRICAL CONDUCTIVITY - Patent 1269520

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EP 1 269 520 A2

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(88)	Date of publication A3:
	21.02.2002

(43)	Date of publication:
	02.01.2003 Bulletin 2003/01

(21)	Application number: 01916604.0

(22)	Date of filing: 13.03.2001

(51)	International Patent Classification (IPC)⁷: H01L 21/00, H01L 21/205

(86)	International application number:
	PCT/US0107/976

(87)	International publication number:
	WO 0106/9659 (20.09.2001 Gazette 2001/38)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

14.03.2000 US 189630 P
23.08.2000 US 644875

(71)	Applicant: Cree Lighting Company
	Goleta, CA 93117 (US)

(72)	Inventors:
	KAPOLNEK, David Santa Barbara, CA 93105 (US) THIBEAULT, Brian Santa Barbara, CA 93101 (US)

(74)	Representative: Butcher, Ian James et al
	A.A. Thornton & Co.235 High Holborn London WC1V 7LE London WC1V 7LE (GB)

(54)	FABRICATION OF SEMICONDUCTOR MATERIALS AND DEVICES WITH CONTROLLED ELECTRICAL CONDUCTIVITY