(19)
(11) EP 1 269 619 A2

(12)

(88) Date of publication A3:
03.01.2002

(43) Date of publication:
02.01.2003 Bulletin 2003/01

(21) Application number: 01924326.0

(22) Date of filing: 22.03.2001
(51) International Patent Classification (IPC)7: H02N 1/00, G02B 26/00
(86) International application number:
PCT/US0109/611
(87) International publication number:
WO 0107/3937 (04.10.2001 Gazette 2001/40)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 24.03.2000 US 191987 P
24.03.2000 US 191856 P
22.03.2000 US 191097 P
28.12.2000 US 751660

(71) Applicant: Onix Microsystems Inc.
Richmond, CA 94806 (US)

(72) Inventors:
  • BEHIN, Behrang
    Berkeley, CA 94709 (US)
  • LAM, Kam, Y.
    Danville, CA 94506 (US)
  • KIANG, Meng-Hsiung
    Berkeley, CA 94709 (US)
  • DANEMAN, Michael, J.
    Pacifica, CA 94044 (US)
  • PANNU, Satinderpall S.
    Berkeley, CA 94707 (US)

(74) Representative: Falk, Urs, Dr. 
Patentanwaltsbüro Dr. Urs Falk,Eichholzweg 9A
6312 Steinhausen
6312 Steinhausen (CH)

   


(54) TWO-DIMENSIONAL GIMBALED SCANNING ACTUATOR WITH VERTICAL ELECTROSTATIC COMB-DRIVE FOR ACTUATION AND/OR SENSING