(19)

(11)

EP 1 274 974 A1

(12)

(43) Date of publication: 15.01.2003 Bulletin 2003/03 (21) Application number: 01931551.4 (22) Date of filing: 28.03.2001

(51) International Patent Classification (IPC)7: G01L 1/12, G01L 3/10, H01L 41/00 (86) International application number: PCT/EP0103/562 (87) International publication number: WO 0107/3390 (04.10.2001 Gazette 2001/40)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 28.03.2000 GB 0007532 (71) Applicant: Fast Technology AG 85521 Ottobrunn (DE)	(72) Inventor: MAY, Lutz, Axel 82538 Gelting (DE) (74) Representative: Bluff, John William et al Lloyd WiseCommonwealth House,1-19 New Oxford Street London WC1A 1LW London WC1A 1LW (GB)