(19)
(11) EP 1 275 150 A2

(12)

(88) Date of publication A3:
28.03.2002

(43) Date of publication:
15.01.2003 Bulletin 2003/03

(21) Application number: 01922806.3

(22) Date of filing: 28.03.2001
(51) International Patent Classification (IPC)7: H01L 23/48
(86) International application number:
PCT/US0109/994
(87) International publication number:
WO 0108/0315 (25.10.2001 Gazette 2001/43)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 12.04.2000 US 547561
12.04.2000 US 547560

(71) Applicant: FORMFACTOR, INC.
Livermore, CA 94550 (US)

(72) Inventors:
  • MATHIEU, Gaetan, L.
    Livermore, CA 94550 (US)
  • ELDRIDGE, Benjamin, N.
    Danville, CA 94526 (US)
  • WENZEL, Stuart, W.
    Pleasanton, CA 94566 (US)

(74) Representative: Käck, Jürgen 
Kahler Käck MollekopfVorderer Anger 239
86899 Landsberg
86899 Landsberg (DE)

   


(54) SHAPED SPRINGS AND METHODS OF FABRICATING AND USING SHAPED SPRINGS