METHOD AND SUBSYSTEM FOR PROCESSING SIGNALS UTILIZING A PLURALITY OF VIBRATING MICROMECHANICAL DEVICES - Patent 1277277

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EP 1 277 277 A2

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(88)	Date of publication A3:
	11.04.2002

(43)	Date of publication:
	22.01.2003 Bulletin 2003/04

(21)	Application number: 01931148.9

(22)	Date of filing: 20.04.2001

(51)	International Patent Classification (IPC)⁷: H03H 1/00

(86)	International application number:
	PCT/US0140/565

(87)	International publication number:
	WO 0108/2478 (01.11.2001 Gazette 2001/44)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

20.04.2000 US 199063 P

(71)	Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
	Ann ArborMi 48109-8202 (US)

(72)	Inventor:
	NGUYEN, Clark, T., C. Ann Arbor, MI 48105 (US)

(74)	Representative: Manley, Nicholas Michael
	W.P. Thompson & Co.Coopers BuildingChurch Street Liverpool L1 3AB Liverpool L1 3AB (GB)

(54)	METHOD AND SUBSYSTEM FOR PROCESSING SIGNALS UTILIZING A PLURALITY OF VIBRATING MICROMECHANICAL DEVICES