(19)

(11)

EP 1 279 069 A2

(12)

(88) Date of publication A3: 28.03.2002 (43) Date of publication: 29.01.2003 Bulletin 2003/05 (21) Application number: 01933046.3 (22) Date of filing: 04.05.2001

(51) International Patent Classification (IPC)7: G03F 7/038, G03F 7/039, G03F 7/004 (86) International application number: PCT/US0114/520 (87) International publication number: WO 0108/6352 (15.11.2001 Gazette 2001/46)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 05.05.2000 US 201961 P (71) Applicant: E.I. DU PONT DE NEMOURS AND COMPANY WilmingtonDelaware 19898 (US)	(72) Inventors: FRYD, Michael Philadelphia, PA 19106 (US) PERIYASAMY, Mookkan Wilmington, DE 19810 (US) SCHADT, Frank, Leonard, III Wilmington, DE 19806 (US) (74) Representative: Towler, Philip Dean  Frank B. Dehn & Co.,European Patent Attorneys,179 Queen Victoria Street London EC4V 4EL London EC4V 4EL (GB)