(19)
(11) EP 1 280 617 A2

(12)

(88) Date of publication A3:
07.02.2002

(43) Date of publication:
05.02.2003 Bulletin 2003/06

(21) Application number: 01934877.0

(22) Date of filing: 17.04.2001
(51) International Patent Classification (IPC)7: B05D 5/12
(86) International application number:
PCT/US0112/281
(87) International publication number:
WO 0108/0286 (25.10.2001 Gazette 2001/43)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 17.04.2000 US 197548 P
05.05.2000 US 201937 P
30.05.2000 US 580105
31.05.2000 US 208197 P
30.06.2000 US 215538 P
11.09.2000 US 231626 P
27.09.2000 US 235794 P
19.12.2000 US 739940
12.02.2001 US 268208 P

(71) Applicant: THE PENN STATE RESEARCH FOUNDATION
University Park, PA 16802 (US)

(72) Inventors:
  • FONASH, Stephen, J.
    State College, PA 16801 (US)
  • KALKAN, Ali, Kaan
    State College, PA 16801 (US)
  • BAE, Sanghoon
    State College, PA 16801 (US)
  • HAYES, Dan
    State College, PA 16801 (US)
  • NAM, Wook, Jun
    State College, PA 16801 (US)
  • CHANG, Kyuhwan
    State College, PA 16801 (US)
  • LEE, Youngchul
    State College, PA 16801 (US)

(74) Representative: Hackett, Sean James et al
Marks & Clerk,Alpha Tower,Suffolk Street Queensway
Birmingham B1 1TT
Birmingham B1 1TT (GB)

   


(54) DEPOSITED THIN FILMS AND THEIR USE IN SEPARATION AND SARCRIFICIAL LAYER APPLICATIONS