(19)
(11) EP 1 282 733 A1

(12)

(43) Date of publication:
12.02.2003 Bulletin 2003/07

(21) Application number: 01924683.4

(22) Date of filing: 04.04.2001
(51) International Patent Classification (IPC)7C30B 15/04
(86) International application number:
PCT/US0111/006
(87) International publication number:
WO 0108/6033 (15.11.2001 Gazette 2001/46)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 10.05.2000 US 568356

(71) Applicant: MEMC Electronic Materials, Inc.
St. Louis,Missouri 63376 (US)

(72) Inventors:
  • CHERKO, Carl, F.
    St. Charles, MO 63303 (US)
  • BANAN, Mohsen
    Grover, MO 63040 (US)
  • KULKARNI, Milind
    St. Louis, MO 63108 (US)

(74) Representative: Maiwald Patentanwalts GmbH 
ElisenhofElisenstrasse 3
80335 München
80335 München (DE)

   


(54) METHOD AND DEVICE FOR FEEDING ARSENIC DOPANT INTO A SILICON CRYSTAL GROWING PROCESS