(19)

(11)

EP 1 284 806 A1

(12)

(43) Date of publication: 26.02.2003 Bulletin 2003/09 (21) Application number: 01930952.5 (22) Date of filing: 27.04.2001

(51) International Patent Classification (IPC)7: B01D 53/04, B01D 53/22 (86) International application number: PCT/US0113/922 (87) International publication number: WO 0108/3084 (08.11.2001 Gazette 2001/45)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR Designated Extension States: AL LT LV MK RO SI (30) Priority: 03.05.2000 US 564323 (71) Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. Danbury, CT 06810 (US)	(72) Inventors: TOM, Glenn, M. New Milford, CT 06776 (US) MCMANUS, James, V. Danbury, CT 06810 (US) (74) Representative: Gee, Steven William  D.W. & S.W. GEE,1 South Lynn Gardens,London Road Shipston on Stour,CV36 4ER Shipston on Stour,CV36 4ER (GB)