(19)
(11) EP 1 284 840 A2

(12)

(88) Date of publication A3:
28.03.2002

(43) Date of publication:
26.02.2003 Bulletin 2003/09

(21) Application number: 01933311.1

(22) Date of filing: 11.05.2001
(51) International Patent Classification (IPC)7: B24B 37/00
(86) International application number:
PCT/US0115/306
(87) International publication number:
WO 0108/7541 (22.11.2001 Gazette 2001/47)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 12.05.2000 US 204212 P
12.05.2000 US 570369
12.05.2000 US 570370

(71) Applicant: Multi-Planar Technologies, Inc.
San Jose, CA 95134 (US)

(72) Inventors:
  • KAJIWARA, Jiro
    Cupertino, CA 95014 (US)
  • MOLONEY, Gerard, S.
    Milpitas, CA 95035 (US)
  • WANG, Huey-Ming
    Fremont, CA 94555 (US)
  • HANSEN, David, A.
    Palo Alto, CA 94306 (US)
  • REYES, Alejandro
    San Jose, CA 95131 (US)

(74) Representative: Wagner & Geyer 
Gewürzmühlstrasse 5
D-80538 München
D-80538 München (DE)

   


(54) PNEUMATIC DIAPHRAGM HEAD HAVING AN INDEPENDENT RETAINING RING AND MULTI-REGION PRESSURE CONTROL, AND METHOD TO USE THE SAME