(19)
(11) EP 1 285 393 A1

(12)

(43) Date of publication:
26.02.2003 Bulletin 2003/09

(21) Application number: 01932637.0

(22) Date of filing: 25.04.2001
(51) International Patent Classification (IPC)7G06G 7/48
(86) International application number:
PCT/US0113/337
(87) International publication number:
WO 0108/4464 (08.11.2001 Gazette 2001/45)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 28.04.2000 US 200307 P
23.04.2001 US 840563

(71) Applicant: TRW, INC.
Redondo Beach,California 90278 (US)

(72) Inventor:
  • TSAI, Roger, S.
    Torrance, CA 90505 (US)

(74) Representative: Schmidt, Steffen J., Dipl.-Ing. 
Wuesthoff & Wuesthoff,Patent- und Rechtsanwälte,Schweigerstrasse 2
81541 München
81541 München (DE)

   


(54) S-PARAMETER MICROSCOPY FOR SEMICONDUCTOR DEVICES