(19)
(11) EP 1 285 976 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
22.12.2004 Bulletin 2004/52

(43) Date of publication A2:
26.02.2003 Bulletin 2003/09

(21) Application number: 02017264.9

(22) Date of filing: 01.08.2002
(51) International Patent Classification (IPC)7: C23C 16/04, C23C 16/455, C23C 16/458
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 20.08.2001 US 933465

(71) Applicant: Goodrich Corporation
Charlotte, North Carolina 28217-4578 (US)

(72) Inventors:
  • Daws, David E.
    San Pedro, California 90732 (US)
  • Rudolph, James W.
    Colorado Springs, Colorado 80906 (US)
  • Zeigler, Dary
    Sun City, California 92586 (US)
  • Bazshushtari, Afshin
    Rolling Hills Estates, California 90274 (US)

(74) Representative: Hilleringmann, Jochen, Dipl.-Ing. et al
Patentanwälte von Kreisler-Selting-Werner, Bahnhofsvorplatz 1 (Deichmannhaus)
50667 Köln
50667 Köln (DE)

   


(54) Hardware assembly for cvi/cvd processes


(57) A hardware assembly is provided for controlling a first portion of gas and a second portion of gas in a furnace. The first portion of the gas is introduced to a center opening region of a stack of porous structures. The second portion of the gas is introduced to an outer region of the stack of porous structures. Most of the gas flows out of the hardware assembly from either the center opening region or the outer region while some of the gas flows out through small holes from the other region. A densification method is also provided with two densification processes in which the gas flows in opposite directions in the two densification processes.






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