(19)

(11)

EP 1 287 555 A1

(12)

(43) Date of publication: 05.03.2003 Bulletin 2003/10 (21) Application number: 01939124.2 (22) Date of filing: 18.05.2001

(51) International Patent Classification (IPC)7: H01L 21/768, H01L 23/532 (86) International application number: PCT/US0116/139 (87) International publication number: WO 0109/3326 (06.12.2001 Gazette 2001/49)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR (30) Priority: 31.05.2000 US 583962 (71) Applicants: Infineon Technologies North America Corp. San Jose, CA 95112-4508 (US) International Business Machines Corporation Armonk, NY 10504 (US)	(72) Inventors: LIMB, Young Poughkeepsie, NY 12601 (US) JONES, Bradley, P. Pleasant Valley, NY 12569 (US) MALDEI, Michael Wappingers Falls, NY 12590 (US) RAMAC, Samuel, C. Poughkeepsie, NY 12601 (US) SNAVELY, Colleen, M. Hopewell Junction, NY 12533 (US) WANG, Yun, Yu Poughquag, NY 12570 (US) (74) Representative: Epping Hermann & Fischer  Ridlerstrasse 55 80339 München 80339 München (DE)