(19)
(11) EP 1 287 592 A1

(12)

(43) Date of publication:
05.03.2003 Bulletin 2003/10

(21) Application number: 01934890.3

(22) Date of filing: 20.04.2001
(51) International Patent Classification (IPC)7: H01S 3/22
(86) International application number:
PCT/US0112/815
(87) International publication number:
WO 0109/7343 (20.12.2001 Gazette 2001/51)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 09.06.2000 US 590961
23.01.2001 US 768753

(71) Applicant: Cymer, Inc.
San Diego, CA 92127 (US)

(72) Inventors:
  • UJAZDOWSKI, Richard, C.
    San Diego, CA 92128 (US)
  • CATES, Michael, C.
    Escondido, CA 92029 (US)
  • MORTON, Richard, G.
    San Diego, CA 92127 (US)
  • HUEBER, Jean-Marc
    La Jolla, CA 92037 (US)
  • WINNICK, Ross, H.
    San Diego, CA 92129 (US)

(74) Representative: Grünecker, Kinkeldey, Stockmair & SchwanhäusserAnwaltssozietät 
Maximilianstrasse 58
80538 München
80538 München (DE)

   


(54) GAS DISCHARGE LASER WITH BLADE-DIELECTRIC ELECTRODE