(19)
(11) EP 1 289 713 A2

(12)

(88) Date of publication A3:
23.05.2002

(43) Date of publication:
12.03.2003 Bulletin 2003/11

(21) Application number: 01948263.7

(22) Date of filing: 31.05.2001
(51) International Patent Classification (IPC)7: B24B 37/00
(86) International application number:
PCT/US0117/774
(87) International publication number:
WO 0109/1969 (06.12.2001 Gazette 2001/49)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU NL PT SE TR

(30) Priority: 31.05.2000 US 586555

(71) Applicant: Koninklijke Philips Electronics N.V.
5621 BA Eindhoven (NL)

(72) Inventors:
  • WHITE, Nelson, W., II.
    Blanco, TX 78606 (US)
  • LIU, Albert, H.
    San Antonio, TX 78240 (US)

(74) Representative: Duijvestijn, Adrianus Johannes 
Internationaal Octrooibureau B.V.,Prof. Holstlaan 6
5656 AA Eindhoven
5656 AA Eindhoven (NL)

   


(54) POLISHING METHODS AND APPARATUS FOR SEMICONDUCTOR AND INTEGRATED CIRCUIT MANUFACTURE