(84) |
Designated Contracting States: |
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AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
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Designated Extension States: |
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AL LT LV MK RO SI |
(30) |
Priority: |
15.05.2000 US 570972
|
(71) |
Applicant: ORBOTECH LTD. |
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Yavne 81102 (IL) |
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(72) |
Inventors: |
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- KATZIR, Yigal
75229 Rishon Lezion (IL)
- GORLIK, Demitry
81207 Yavne (IL)
|
(74) |
Representative: Kuhnen & Wacker |
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Patentanwaltsgesellschaft dbRPrinz-Ludwig-Strasse 40A 85354 Freising 85354 Freising (DE) |
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