(19)
(11) EP 1 290 484 A2

(12)

(88) Date of publication A3:
15.08.2002

(43) Date of publication:
12.03.2003 Bulletin 2003/11

(21) Application number: 01929949.4

(22) Date of filing: 10.05.2001
(51) International Patent Classification (IPC)7G02B 21/00
(86) International application number:
PCT/IL0100/410
(87) International publication number:
WO 0108/8592 (22.11.2001 Gazette 2001/47)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 15.05.2000 US 570972

(71) Applicant: ORBOTECH LTD.
Yavne 81102 (IL)

(72) Inventors:
  • KATZIR, Yigal
    75229 Rishon Lezion (IL)
  • GORLIK, Demitry
    81207 Yavne (IL)

(74) Representative: Kuhnen & Wacker 
Patentanwaltsgesellschaft dbRPrinz-Ludwig-Strasse 40A
85354 Freising
85354 Freising (DE)

   


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