(19)

(11)

EP 1 290 495 A2

(12)

(88) Date of publication A3: 28.11.2002 (43) Date of publication: 12.03.2003 Bulletin 2003/11 (21) Application number: 01946420.5 (22) Date of filing: 15.06.2001

(51) International Patent Classification (IPC)7: G03F 1/00 (86) International application number: PCT/US0119/282 (87) International publication number: WO 0109/6955 (20.12.2001 Gazette 2001/51)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR (30) Priority: 15.06.2000 US 211670 P (71) Applicant: Applied Materials, Inc. Santa Clara,California 95054 (US)	(72) Inventors: STOEHR, Briggitte San Jose, CA 95131 (US) WELCH, Michael Pleasanton, CA 94566 (US) BUIE, Melissa, J. San Jose, CA 95117 (US) (74) Representative: Bayliss, Geoffrey Cyril et al BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)