(19)
(11) EP 1 292 986 A2

(12)

(88) Date of publication A3:
17.10.2002

(43) Date of publication:
19.03.2003 Bulletin 2003/12

(21) Application number: 01952175.6

(22) Date of filing: 20.06.2001
(51) International Patent Classification (IPC)7: H01L 27/108
(86) International application number:
PCT/US0119/684
(87) International publication number:
WO 0109/9160 (27.12.2001 Gazette 2001/52)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 20.06.2000 US 597114

(71) Applicants:
  • Infineon Technologies North America Corp.
    San Jose, CA 95112-4508 (US)
  • International Business Machines Corporation
    Armonk, NY 10504 (US)

(72) Inventors:
  • SCHNABEL, Rainer, Florian
    85635 Hohenkirche (DE)
  • RADENS, Carl, J.
    LaGrangville, NY 12540 (US)
  • LANDIS, Howard
    Underhill, CT 05489 (US)
  • PARK, Young Jin
    Bundang463-772 SungnamKyungki (KR)
  • KOTECKI, David
    Orono, ME 04473 (US)
  • REITH, Armin, M.
    81543 Munich (DE)
  • TRICKLE, Wayne
    Cambridge, CT 05444 (US)
  • WORDEMAN, Matthew, R.
    Kula, HI 96780 (US)

(74) Representative: Epping Hermann & Fischer 
Ridlerstrasse 55
80339 München
80339 München (DE)

   


(54) REDUCTION OF TOPOGRAPHY BETWEEN SUPPORT REGIONS AND ARRAY REGIONS OF MEMORY DEVICES