CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS. - Patent 1294493

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(11)

EP 1 294 493 A2

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(88)	Date of publication A3:
	18.04.2002

(43)	Date of publication:
	26.03.2003 Bulletin 2003/13

(21)	Application number: 01956480.6

(22)	Date of filing: 15.06.2001

(51)	International Patent Classification (IPC)⁷: B06B 1/02

(86)	International application number:
	PCT/EP0106/868

(87)	International publication number:
	WO 0109/7559 (20.12.2001 Gazette 2001/51)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

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Priority:

15.06.2000 US 596759
27.10.2000 US 698232

(71)	Applicant: Koninklijke Philips Electronics N.V.
	5621 BA Eindhoven (NL)

(72)	Inventor:
	FRASER, John, D. NL-5656 AA Eindhoven (NL)

(74)	Representative: Lottin, Claudine et al
	Philips Corporate Intellectual Property,156 Boulevard Haussmann 75008 Paris 75008 Paris (FR)

(54)	CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS.