METHOD OF CONTROLLING WELL LEAKAGE FOR TRENCH ISOLATIONS OF DIFFERING DEPTHS - Patent 1295329

(19)

(11)

EP 1 295 329 A2

(12)

(88)	Date of publication A3:
	11.04.2002

(43)	Date of publication:
	26.03.2003 Bulletin 2003/13

(21)	Application number: 01928571.7

(22)	Date of filing: 16.04.2001

(51)	International Patent Classification (IPC)⁷: H01L 21/762, H01L 21/66

(86)	International application number:
	PCT/US0112/360

(87)	International publication number:
	WO 0109/3311 (06.12.2001 Gazette 2001/49)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

(30)

Priority:

25.05.2000 US 578760

(71)	Applicant: ADVANCED MICRO DEVICES INC.
	Sunnyvale,California 94088-3453 (US)

(72)	Inventor:
	FULFORD, H., Jim Austin, TX 78748 (US)

(74)	Representative: Wright, Hugh Ronald
	Brookes Batchellor,102-108 Clerkenwell Road London EC1M 5SA London EC1M 5SA (GB)

(54)	METHOD OF CONTROLLING WELL LEAKAGE FOR TRENCH ISOLATIONS OF DIFFERING DEPTHS