VIA FIRST DUAL DAMASCENE PROCESS OFR COPPER METALLIZATION - Patent 1295333

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EP 1 295 333 A2

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(88)	Date of publication A3:
	06.06.2002

(43)	Date of publication:
	26.03.2003 Bulletin 2003/13

(21)	Application number: 01953408.0

(22)	Date of filing: 02.07.2001

(51)	International Patent Classification (IPC)⁷: H01L 21/768

(86)	International application number:
	PCT/US0121/161

(87)	International publication number:
	WO 0200/3457 (10.01.2002 Gazette 2002/02)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

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Priority:

30.06.2000 US 608540

(71)	Applicants:
	Infineon Technologies North America Corp. San Jose, CA 95112-4508 (US) International Business Machines Corporation Armonk, NY 10504 (US)

(72)	Inventors:
	BRASE, Gabriela F-91630 Marolles-en-h (FR) SCHROEDER, Uwe, Paul 01465 Dresden (DE) HOLLOWAY, Karen, Lynne Poughkeepsie, NY 12603 (US)

(74)	Representative: Epping Hermann & Fischer
	Ridlerstrasse 55 80339 München 80339 München (DE)

(54)	VIA FIRST DUAL DAMASCENE PROCESS OFR COPPER METALLIZATION