(19)
(11) EP 1 297 560 A2

(12)

(88) Date of publication A3:
20.06.2002

(43) Date of publication:
02.04.2003 Bulletin 2003/14

(21) Application number: 01952404.0

(22) Date of filing: 03.07.2001
(51) International Patent Classification (IPC)7: H01L 21/00
(86) International application number:
PCT/US0121/154
(87) International publication number:
WO 0200/5323 (17.01.2002 Gazette 2002/03)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 06.07.2000 US 611349

(71) Applicant: Applied Materials, Inc.
Santa Clara,California 95052 (US)

(72) Inventors:
  • BOAS, Ryan, C.
    Santa Clara, CA 95051 (US)
  • BALAKRISHNA, Ajit
    Sunnyvale, CA 94087 (US)
  • BIERMAN, Benjamin
    Fremont, CA 94539 (US)
  • HAAS, Brian, L.
    San Jose CA 95123 (US)
  • JENNINGS, Dean
    San Ramon, CA 94583 (US)
  • ADERHOLD, Wolfgang
    Cupertino, CA 95014 (US)
  • RAMAMURTHY, Sundar
    Fremont, CA 94538 (US)
  • MAYUR, Abhilash
    Salinas, CA 93906 (US)

(74) Representative: Bayliss, Geoffrey Cyril et al
BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road
London WC1X 8BT
London WC1X 8BT (GB)

   


(54) THERMALLY PROCESSING A SUBSTRATE