(19)
(11) EP 1 301 651 A2

(12)

(88) Date of publication A3:
20.06.2002

(43) Date of publication:
16.04.2003 Bulletin 2003/16

(21) Application number: 01952519.5

(22) Date of filing: 09.07.2001
(51) International Patent Classification (IPC)7C23C 14/46
(86) International application number:
PCT/US0121/517
(87) International publication number:
WO 0200/4695 (17.01.2002 Gazette 2002/03)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 10.07.2000 US 217049 P
23.04.2001 US 840394

(71) Applicant: Opnetics Corporation
Peabody, MA 01960 (US)

(72) Inventors:
  • SFERLAZZO, Piero
    Marblehead, MA 01945 (US)
  • LEE, Chunghsin
    Lynnfield, MA 01940 (US)

(74) Representative: Jackson, Robert Patrick 
Frank B. Dehn & Co.,European Patent Attorneys,179 Queen Victoria Street
London EC4V 4EL
London EC4V 4EL (GB)

   


(54) THIN FILM PROCESSING SYSTEM