(19)

(11)

EP 1 301 938 A2

(12)

(88) Date of publication A3: 20.06.2002 (43) Date of publication: 16.04.2003 Bulletin 2003/16 (21) Application number: 01950648.4 (22) Date of filing: 29.06.2001

(51) International Patent Classification (IPC)7: H01J 37/00 (86) International application number: PCT/US0120/717 (87) International publication number: WO 0200/5308 (17.01.2002 Gazette 2002/03)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR (30) Priority: 06.07.2000 US 610800 06.07.2000 US 611168 06.07.2000 US 611345 06.07.2000 US 611169 06.07.2000 US 611170 (71) Applicant: Applied Materials, Inc. Santa Clara,California 95052 (US)	(72) Inventors: HOLLAND, John San Jose, CA 95126 (US) TODOROW, Valentin, N. Fremont, CA 94538 (US) BARNES, Michael San Remon, CA 94583 (US) (74) Representative: Bayliss, Geoffrey Cyril et al BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)