(19)

(11)

EP 1 303 869 A2

(12)

(88) Date of publication A3: 13.06.2002 (43) Date of publication: 23.04.2003 Bulletin 2003/17 (21) Application number: 01959774.9 (22) Date of filing: 26.06.2001

(51) International Patent Classification (IPC)7: H01L 21/00 (86) International application number: PCT/US0141/233 (87) International publication number: WO 0200/9162 (31.01.2002 Gazette 2002/05)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR (30) Priority: 25.07.2000 US 625131 (71) Applicant: Applied Materials, Inc. Santa Clara,California 95052 (US)	(72) Inventors: BJORKMAN, Claes Mountain View, CA 94041 (US) DOAN, Kenny San Jose, CA 95131 (US) PU, Bryan San Jose, CA 95135 (US) NOORBAKHSH, Hamid Fremont, CA 94539 (US) (74) Representative: Zimmermann, Gerd Heinrich et al Zimmermann & Partner,P.O. Box 33 09 20 80069 München 80069 München (DE)