(19)
(11) EP 1 304 021 A1

(12)

(43) Date of publication:
23.04.2003 Bulletin 2003/17

(21) Application number: 01951703.6

(22) Date of filing: 26.07.2001
(51) International Patent Classification (IPC)7H05H 1/24
(86) International application number:
PCT/EP0108/647
(87) International publication number:
WO 0200/9482 (31.01.2002 Gazette 2002/05)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 26.07.2000 EP 00115997

(71) Applicant: UNIVERSITEIT GENT
9000 Gent (BE)

(72) Inventor:
  • LEYS, Christophe
    B-8200 Brugge (BE)

(74) Representative: Bird, Ariane et al
Bird Goen & Co,Klein Dalenstraat 42A
3020 Winksele
3020 Winksele (BE)

   


(54) DC PLASMA GENERATOR FOR GENERATION OF A NON-LOCAL, NON-EQUILIBRIUM PLASMA AT HIGH PRESSURE