(19)
(11) EP 1 305 640 A2

(12)

(88) Date of publication A3:
02.05.2002

(43) Date of publication:
02.05.2003 Bulletin 2003/18

(21) Application number: 01956027.5

(22) Date of filing: 27.07.2001
(51) International Patent Classification (IPC)7: G01P 15/08, B81C 3/00, B81B 3/00
(86) International application number:
PCT/US0123/797
(87) International publication number:
WO 0201/1188 (07.02.2002 Gazette 2002/06)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 01.08.2000 US 629684

(71) Applicants:
  • HRL LABORATORIES, LLC
    Malibu, CA 90265-4799 (US)
  • Hughes Electronics Corporation
    El Segundo,California 90245-0956 (US)

(72) Inventors:
  • KUBENA, Randall, L.
    Oak Park, CA 91377 (US)
  • LITTLE, Michael, J.
    Woodland Hills, CA 91364 (US)
  • HACKETT, LeRoy, H.
    Woodland Hills, CA 91364 (US)

(74) Representative: Ebner von Eschenbach, Jennifer et al
Ladas & Parry,Dachauerstrasse 37
80335 München
80335 München (DE)

   


(54) A MEM SENSOR AND A METHOD OF MAKING SAME