(19)
(11) EP 1 307 340 A1

(12)

(43) Date of publication:
07.05.2003 Bulletin 2003/19

(21) Application number: 01958938.1

(22) Date of filing: 13.07.2001
(51) International Patent Classification (IPC)7B32B 15/04, B32B 9/00
(86) International application number:
PCT/US0122/131
(87) International publication number:
WO 0200/7966 (31.01.2002 Gazette 2002/05)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 14.07.2000 US 218422 P

(71) Applicant: MicroCoating Technologies, Inc.
Chamblee,Georgia 30341 (US)

(72) Inventors:
  • HUNT, Andrew, Tye
    Atlanta, GA 30342 (US)
  • DESHPANDE, Girish
    Atlanta, GA 30329 (US)
  • HWANG, Tzyy-Jiuan Jan
    Alpharetta, GA 30022 (US)
  • JIANG, Yongdong
    Atlanta, GA 30345 (US)
  • FAGUY, Peter
    Suwanee, GA 30324 (US)

(74) Representative: Bankes, Stephen Charles Digby et al
BARON & WARREN19 South EndKensington
London W8 5BU
London W8 5BU (GB)

   


(54) REDUCED GRAIN BOUNDARY CRYSTALLINE THIN FILMS