(19)

(11)

EP 1 307 785 A2

(12)

(88) Date of publication A3: 08.08.2002 (43) Date of publication: 07.05.2003 Bulletin 2003/19 (21) Application number: 01949500.1 (22) Date of filing: 20.07.2001

(51) International Patent Classification (IPC)7: G03F 7/40, G03F 7/00, H01L 21/027 (86) International application number: PCT/EP0108/391 (87) International publication number: WO 0201/0858 (07.02.2002 Gazette 2002/06)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR (30) Priority: 31.07.2000 US 629279 (71) Applicant: CLARIANT INTERNATIONAL LTD. 4132 Muttenz (CH)	(72) Inventors: DAMMEL, Ralph, R. Flemington, NJ 08822 (US) EAKIN, Ronald, J. Flower Mound, TX 75028 (US) SPAK, Mark, A. Edison, NJ 08837 (US) (74) Representative: Hütter, Klaus, Dr. et al Clariant GmbHPatente, Marken, LizenzenAm Unisys-Park 1 65843 Sulzbach 65843 Sulzbach (DE)