| (84) |
Designated Contracting States: |
|
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
| (30) |
Priority: |
11.08.2000 US 638075
11.08.2000 US 636435
11.08.2000 US 637174
11.08.2000 US 636436
11.08.2000 US 636434
11.08.2000 US 636699
11.08.2000 US 636700
|
| (71) |
Applicant: Applied Materials, Inc. |
|
Santa Clara,California 95052 (US) |
|
| (72) |
Inventors: |
|
- HANAWA, Hiroji
Sunnyvale, CA 94086 (US)
- YE, Yan
Campbell, CA 95008 (US)
- COLLINS, Kenneth, S.
San Jose, CA 95120 (US)
- RAMASWAMY, Kartik
Santa Clara, CA 95051 (US)
- NGUYEN, Andrew
San Jose, CA 95132 (US)
- TANAKA, Tsutomu
Santa Clara, CA 95051 (US)
|
| (74) |
Representative: Zimmermann, Gerd Heinrich et al |
|
Zimmermann & Partner,P.O. Box 33 09 20
80069 München
80069 München (DE) |
|
