(19)
(11) EP 1 311 826 A1

(12)

(43) Date of publication:
21.05.2003 Bulletin 2003/21

(21) Application number: 01937297.8

(22) Date of filing: 10.05.2001
(51) International Patent Classification (IPC)7: G01N 21/01
(86) International application number:
PCT/US0115/193
(87) International publication number:
WO 0109/6836 (20.12.2001 Gazette 2001/51)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 09.06.2000 DE 10028569

(71) Applicants:
  • BROOKS Automation GmbH
    07745 Jena (DE)
  • BROOKS AUTOMATION, INC.
    Chelmsford, MA 01824 (US)

(72) Inventors:
  • KONIG, Joachim
    01728 Hanichen (DE)
  • KRUGER, Steffen
    01665 Triebischtal (DE)
  • ZIMMER, Björn
    85567 Grafing (DE)
  • HEINZE, Manfred
    01109 Dresden (DE)

(74) Representative: Beetz & PartnerPatentanwälte 
Steinsdorfstrasse 10
80538 München
80538 München (DE)

   


(54) DEVICE FOR POSITIONING DISK-SHAPED OBJECTS