(19)
(11) EP 1 311 893 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
01.02.2006 Bulletin 2006/05

(45) Mention of the grant of the patent:
30.11.2005 Bulletin 2005/48

(21) Application number: 01966701.3

(22) Date of filing: 17.08.2001
(51) International Patent Classification (IPC): 
G02B 21/06(1968.09)
 G02B 27/28(1968.09)
(86) International application number:
PCT/US2001/041770
(87) International publication number:
WO 2002/016893 (28.02.2002 Gazette 2002/09)

(54)

SMALL-SPOT SPECTROMETRY INSTRUMENT WITH REDUCED POLARIZATION

SPEKTROMETRISCHES INSTRUMENT MIT KLEINEM BRENNFLECK UND REDUZIERTER POLARISATION

INSTRUMENT DE SPECTROMETRIE FINE A POLARISATION REDUITE

(84) Designated Contracting States:
DE FR GB NL

(30) Priority: 18.08.2000 US 226396 P

(43) Date of publication of application:
21.05.2003 Bulletin 2003/21

(73) Proprietor: TOKYO ELECTRON LIMITED
Tokyo 107-8481 (JP)

(72) Inventors:
  • NORTON, Adam, E.
    Palo Alto, CA 94303 (US)
  • JOHNSON, Kenneth, C.
    Santa Clara, CA 95051 (US)
  • STANKE, Fred, E.
    Cupertino, CA 95014 (US)

(74) Representative: Käck, Jürgen 
Patentanwälte Kahler Käck Mollekopf Vorderer Anger 239
86899 Landsberg
86899 Landsberg (DE)


(56) References cited: : 
US-A- 5 037 200
US-A- 5 834 758
 US-A- 5 638 207
   
       
    Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).