(19)
(11) EP 1 312 112 A2

(12)

(88) Date of publication A3:
07.11.2002

(43) Date of publication:
21.05.2003 Bulletin 2003/21

(21) Application number: 01978288.7

(22) Date of filing: 20.08.2001
(51) International Patent Classification (IPC)7: H01L 21/66, H01L 21/3105
(86) International application number:
PCT/EP0109/648
(87) International publication number:
WO 0201/7381 (28.02.2002 Gazette 2002/09)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 24.08.2000 US 645735

(71) Applicant: Koninklijke Philips Electronics N.V.
5621 BA Eindhoven (NL)

(72) Inventors:
  • DUNTON, Samuel
    NL-5656 AA Eindhoven (NL)
  • LIANG, Victor
    NL-5656 AA Eindhoven (NL)
  • ZHANG, Liming
    NL-5656 AA Eindhoven (NL)

(74) Representative: Duijvestijn, Adrianus Johannes 
Internationaal Octrooibureau B.V.,Prof. Holstlaan 6
5656 AA Eindhoven
5656 AA Eindhoven (NL)

   


(54) METHOD FOR PREVENTING DAMAGE TO WAFERS IN A SEQUENTIAL MULTIPLE STEPS POLISHING PROCESS