(19)
(11)
EP 1 315 598 A2
(12)
(88)
Date of publication A3:
16.05.2002
(43)
Date of publication:
04.06.2003
Bulletin 2003/23
(21)
Application number:
01956736.1
(22)
Date of filing:
27.08.2001
(51)
International Patent Classification (IPC)
7
:
B24B
37/04
,
B24B
49/12
(86)
International application number:
PCT/IB0101/532
(87)
International publication number:
WO 0201/8100
(
07.03.2002
Gazette 2002/10)
(84)
Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
(30)
Priority:
31.08.2000
US 652898
(71)
Applicant:
MOTOROLA, INC.
Schaumburg, IL 60196 (US)
(72)
Inventor:
HAGGART, David
Scottsdale, AZ 85251 (US)
(74)
Representative:
Gibson, Sarah Jane
MotorolaEuropean Intellectual Property OperationsMidpointAlencon Link
Basingstoke,Hampshire RG21 7PL
Basingstoke,Hampshire RG21 7PL (GB)
(54)
METHOD AND APPARATUS FOR MEASURING A POLISHING CONDITION