(19)
(11) EP 1 315 598 A2

(12)

(88) Date of publication A3:
16.05.2002

(43) Date of publication:
04.06.2003 Bulletin 2003/23

(21) Application number: 01956736.1

(22) Date of filing: 27.08.2001
(51) International Patent Classification (IPC)7B24B 37/04, B24B 49/12
(86) International application number:
PCT/IB0101/532
(87) International publication number:
WO 0201/8100 (07.03.2002 Gazette 2002/10)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 31.08.2000 US 652898

(71) Applicant: MOTOROLA, INC.
Schaumburg, IL 60196 (US)

(72) Inventor:
  • HAGGART, David
    Scottsdale, AZ 85251 (US)

(74) Representative: Gibson, Sarah Jane 
MotorolaEuropean Intellectual Property OperationsMidpointAlencon Link
Basingstoke,Hampshire RG21 7PL
Basingstoke,Hampshire RG21 7PL (GB)

   


(54) METHOD AND APPARATUS FOR MEASURING A POLISHING CONDITION