(19)
(11) EP 1 315 993 A2

(12)

(88) Date of publication A3:
06.09.2002

(43) Date of publication:
04.06.2003 Bulletin 2003/23

(21) Application number: 01959466.2

(22) Date of filing: 03.08.2001
(51) International Patent Classification (IPC)7G02B 26/00, G03B 21/28
(86) International application number:
PCT/US0124/332
(87) International publication number:
WO 0201/2925 (14.02.2002 Gazette 2002/07)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 03.08.2000 US 631536
30.08.2000 US 229246 P
07.12.2000 US 732445

(71) Applicant: Reflectivity Inc.
Santa Clara, CA 95054 (US)

(72) Inventors:
  • HUIBERS, Andrew, G.
    Mountain View, CA 94041 (US)
  • ILKOV, Fedor
    Santa Clara, CA 95051 (US)
  • PATEL, Satyadev
    Elk Grove, CA 95758 (US)
  • RICHARDS, Peter, W.
    Palo Alto, CA 94303 (US)
  • STOCKTON, John
    Pasadena, CA 91106 (US)

(74) Representative: Kirschner, Klaus Dieter, Dipl.-Phys. 
Schneiders & BehrendtRechtsanwälte - PatentanwälteSollner Strasse 38
81479 München
81479 München (DE)

   


(54) MICROMIRROR ELEMENTS, PACKAGE FOR THE MICROMIRROR ELEMENTS, AND PROTECTION SYSTEM THEREFOR