(19)
(11) EP 1 318 308 A3

(12) EUROPEAN PATENT APPLICATION

(88) Date of publication A3:
03.12.2003 Bulletin 2003/49

(43) Date of publication A2:
11.06.2003 Bulletin 2003/24

(21) Application number: 02258145.8

(22) Date of filing: 27.11.2002
(51) International Patent Classification (IPC)7: F04D 19/04, F04D 29/26
(84) Designated Contracting States:
AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 04.12.2001 JP 2001370627

(71) Applicant: BOC Edwards Technologies, Limited
Narashino-shi, Chiba (JP)

(72) Inventors:
  • Nonaka, Manabu
    Narashino-shi, Chiba (JP)
  • Miwata, Tooru
    Narashino-shi, Chiba (JP)
  • Kabasawa, Takashi
    Narashino-shi, Chiba (JP)

(74) Representative: Sturt, Clifford Mark et al
Miller Sturt Kenyon 9 John Street
London WC1N 2ES
London WC1N 2ES (GB)

   


(54) Vacuum pump


(57) A multiple cylinder (2) having a plurality of cylinders (4, 5) arranged concentrically and a rotor shaft (8) rotatably disposed on the center axis of the multiple cylinder are provided in a pump casing (1). Each of the cylinders that constitute the multiple cylinder has a mounting portion (10, 11), through which the cylinders are integrally fixed to the rotor shaft.






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