CMP APPARATUS AND METHODS TO CONTROL THE TILT OF THE CARRIER HEAD, THE RETAINING RING AND THE PAD CONDITIONER - Patent 1320441

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EP 1 320 441 A1

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(43)	Date of publication:
	25.06.2003 Bulletin 2003/26

(21)	Application number: 01971321.3

(22)	Date of filing: 21.09.2001

(51)	International Patent Classification (IPC)⁷: B24B 37/04, B24B 41/04, B24B 41/06, B24B 53/007

(86)	International application number:
	PCT/US0129/799

(87)	International publication number:
	WO 0202/4410 (28.03.2002 Gazette 2002/12)

(84)	Designated Contracting States:
	AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
	Designated Extension States:
	AL LT LV MK RO SI

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Priority:

22.09.2000 US 668667
22.09.2000 US 668705

(71)	Applicant: LAM RESEARCH CORPORATION
	Fremont, CA 94538-6470 (US)

(72)	Inventor:
	WILLIAMS, Damon, Vincent Fremont, CA 94536 (US)

(74)	Representative: Thomson, Paul Anthony
	Potts, Kerr & Co.15, Hamilton Square BirkenheadMerseyside CH41 6BR BirkenheadMerseyside CH41 6BR (GB)

(54)	CMP APPARATUS AND METHODS TO CONTROL THE TILT OF THE CARRIER HEAD, THE RETAINING RING AND THE PAD CONDITIONER