(19)

(11)

EP 1 322 941 A2

(12)

(88) Date of publication A3: 06.06.2002 (43) Date of publication: 02.07.2003 Bulletin 2003/27 (21) Application number: 01977451.2 (22) Date of filing: 02.10.2001

(51) International Patent Classification (IPC)7: G01N 21/95, H01L 21/66 (86) International application number: PCT/US0131/029 (87) International publication number: WO 0202/9392 (11.04.2002 Gazette 2002/15)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR (30) Priority: 02.10.2000 US 237297 P 13.07.2001 US 905607 (71) Applicant: Applied Materials, Inc. Santa Clara,California 95054 (US)	(72) Inventors: DOR, Amos Sunnyvale, CA 94087 (US) RADZINSKI, Maya Palo Alto, CA 94303 (US) (74) Representative: Bayliss, Geoffrey Cyril et al BOULT WADE TENNANT,Verulam Gardens70 Gray's Inn Road London WC1X 8BT London WC1X 8BT (GB)