(19)
(11) EP 1 325 167 B8

(12) CORRECTED EUROPEAN PATENT SPECIFICATION
Note: Bibliography reflects the latest situation

(15) Correction information:
Corrected version no 1 (W1 B1)

(48) Corrigendum issued on:
29.09.2004 Bulletin 2004/40

(45) Mention of the grant of the patent:
04.08.2004 Bulletin 2004/32

(21) Application number: 01971886.5

(22) Date of filing: 07.08.2001
(51) International Patent Classification (IPC)7: C23C 2/00
(86) International application number:
PCT/EP2001/009119
(87) International publication number:
WO 2002/012584 (14.02.2002 Gazette 2002/07)

(54)

SPUTTERTARGET

ZERSTÄUBUNGSTARGET

CIBLE DE PULVERISATION CATHODIQUE

(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR

(30) Priority: 08.08.2000 DE 10039478

(43) Date of publication of application:
09.07.2003 Bulletin 2003/28

(73) Proprietor: CemeCon AG
52146 Würselen (DE)

(72) Inventors:
  • HERMELER, Bernd
    52074 Aachen (DE)
  • WUROPULOS, Alexander
    52066 Aachen (DE)

(74) Representative: Patentanwälte Wenzel & Kalkoff 
Flasskuhle 6
58452 Witten
58452 Witten (DE)


(56) References cited: : 
US-A- 4 610 774
   
  • PATENT ABSTRACTS OF JAPAN vol. 011, no. 163 (C-424), 26 May 1987 (1987-05-26) & JP 61 291969 A (MATSUSHITA ELECTRIC IND CO LTD), 22 December 1986 (1986-12-22)
  • PATENT ABSTRACTS OF JAPAN vol. 011, no. 185 (C-428), 13 June 1987 (1987-06-13) & JP 62 007852 A (TOSHIBA CORP), 14 January 1987 (1987-01-14)
  • PATENT ABSTRACTS OF JAPAN vol. 006, no. 122 (C-112), 7 July 1982 (1982-07-07) & JP 57 047871 A (HITACHI LTD), 18 March 1982 (1982-03-18)
   
Note: Within nine months from the publication of the mention of the grant of the European patent, any person may give notice to the European Patent Office of opposition to the European patent granted. Notice of opposition shall be filed in a written reasoned statement. It shall not be deemed to have been filed until the opposition fee has been paid. (Art. 99(1) European Patent Convention).