(19)

(11)

EP 1 325 173 A2

(12)

(88) Date of publication A3: 17.10.2002 (43) Date of publication: 09.07.2003 Bulletin 2003/28 (21) Application number: 01985732.5 (22) Date of filing: 02.08.2001

(51) International Patent Classification (IPC)7: C23C 28/00 (86) International application number: PCT/US0124/238 (87) International publication number: WO 0202/7066 (04.04.2002 Gazette 2002/14)

(84) Designated Contracting States: AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR (30) Priority: 17.08.2000 US 640073 (71) Applicant: Siemens Westinghouse Power Corporation Orlando, FL 32828-2399 (US)	(72) Inventors: SUBRAMANIAN, Ramesh Oviedo, FL 32765 (US) SETH, Brij, B. Maitland, FL 32751 (US) (74) Representative: Neill, Andrew Peter  Siemens AG,Postfach 22 16 34 80506 München 80506 München (DE)