(19)
(11) EP 1 326 903 A2

(12)

(88) Date of publication A3:
21.11.2002

(43) Date of publication:
16.07.2003 Bulletin 2003/29

(21) Application number: 01987900.6

(22) Date of filing: 16.10.2001
(51) International Patent Classification (IPC)7C08F 232/08
(86) International application number:
PCT/US0142/743
(87) International publication number:
WO 0203/3489 (25.04.2002 Gazette 2002/17)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 18.10.2000 US 691280

(71) Applicant: E. I. du Pont de Nemours and Company
Wilmington,Delaware 19898 (US)

(72) Inventors:
  • BERGER, Larry, L.
    Chadds Ford, PA 19317 (US)
  • CRAWFORD, Michael, Karl
    Glen Mills, PA 19342 (US)
  • FELDMAN, Jerald
    Hockessin, DE 19707 (US)
  • JOHNSON, Lynda, Kaye
    Wilmington, DE 19803 (US)
  • SCHADT, III, Frank, L.
    Wilmington, DE 19806 (US)
  • ZUMSTEG, JR., Fredrick, Claus
    Wilmington, DE 19810 (US)

(74) Representative: Towler, Philip Dean 
Frank B. Dehn & Co.,European Patent Attorneys,179 Queen Victoria Street
London EC4V 4EL
London EC4V 4EL (GB)

   


(54) COMPOSITIONS FOR MICROLITHOGRAPHY