(19)
(11) EP 1 328 847 A1

(12)

(43) Date of publication:
23.07.2003 Bulletin 2003/30

(21) Application number: 01959977.8

(22) Date of filing: 24.08.2001
(51) International Patent Classification (IPC)7G03F 7/20, H01L 21/266, H01L 21/3105, G01N 1/00
(86) International application number:
PCT/AU0101/056
(87) International publication number:
WO 0201/9036 (07.03.2002 Gazette 2002/10)
(84) Designated Contracting States:
AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
Designated Extension States:
AL LT LV MK RO SI

(30) Priority: 31.08.2000 AU PP980700

(71) Applicant: Unisearch Limited
Sydney, NSW 2052 (AU)

(72) Inventors:
  • BRENNER, Rolf
    Randwick, NSW 2031 (AU)
  • BUEHLER, Tilo, Markus
    Randwick, NSW 2031 (AU)
  • CLARK, Robert, Graham
    Balgowlah Heights, NSW 2093 (AU)
  • DZURAK, Andrew, Steven
    Potts Point, NSW 2011 (AU)
  • HAMILTON, Alexander, Rudolf
    Coogee, NSW 2034 (AU)
  • LUMPKIN, Nancy, Ellen
    Waterfall, NSW 2233 (AU)
  • MCKINNON, Rita, Patricia
    Dulwich Hill, NSW 2203 (AU)

(74) Representative: Brunner, Michael John 
GILL JENNINGS & EVERY,Broadgate House,7 Eldon Street
London EC2M 7LH
London EC2M 7LH (GB)

   


(54) FABRICATION OF NANOELECTRONIC CIRCUITS